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Semi-insulating SiC On Si Composite Substrates 4H Exhibit High Resistivity LED
A semi-insulating silicon carbide (SiC) on silicon compound wafer is a specialized type of wafer that combines the properties of silicon carbide and silicon materials. The wafer consists of a layer of semi-insulating silicon carbide on top of a silicon substrate. The term "semi-insulating" indicates that the material has electrical properties that are not purely conductive or purely insulating, but somewhere in between.
Character of SiC On Si Composite Substrates:
1. High Resistivity: Semi-insulating SiC on Si wafers exhibit high resistivity, which means they have low electrical conductivity compared to regular conductive materials.
2. Low Leakage: Due to their semi-insulating nature, these wafers
have low leakage currents, making them suitable for applications
requiring minimal electrical leakage.
3. High Breakdown Voltage: They typically have a high breakdown
voltage, enabling them to withstand high electric fields without
breakdown.
Item | Specification |
Diameter | 150 ± 0.2 mm |
SiC Polytype | 4H |
SiC Resistivity | ≥1E8 Ω·cm |
Transfer SiC layer Thickness | ≥0.1 μm |
Void | ≤5 ea/wafer (2 mm > D > 0.5 mm) |
Front roughness | Ra ≤ 0.2 nm (5 μm × 5 μm) |
Si Orientation | <111>/<100>/<110> |
Si Type | P/N |
Flat/Notch | Flat/Notch |
Edge Chip, Scratch, Crack (visual inspection) | None |
TTV | ≤5 μm |
Thickness | 500/625/675 ± 25 μm |
1. High-Frequency Devices: Semi-insulating SiC on Si compound wafers are commonly used in high-frequency devices such as RF transistors, amplifiers, and microwave systems.
2. Power Electronics: They find applications in power electronic
devices where high breakdown voltage and low electrical losses are
crucial for efficient power conversion.
3. Sensors: These wafers are utilized in sensor technologies where
high resistivity and low leakage characteristics are required for
accurate sensing and measurement.
4. Optoelectronics: In optoelectronic devices like photodetectors
and LEDs, semi-insulating SiC on Si wafers can provide improved
performance due to their unique electrical properties.
Applications Picture of SiC On Si Composite Substrates:
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