β-Ga2O3 is a gallium oxide compound, which is a wide band gap
semiconductor material. Its crystal structure belongs to the hexagonal crystal system, with
high electron mobility and large band width, so it has a wide
application prospect. Here are some details about β-Ga2O3:
Physical properties:
Crystal structure: hexagonal crystal system
Density: 5.88 g/cm³
Lattice constant: a = 0.121 nm, c = 0.499 nm
Melting point: 1725 °C
Refractive index: 1.9-2.5
Transparent wavelength range: 0.23-6.0μm
Electrical properties:
Band width: 4.8eV
Electron mobility: 200-600 cm²/Vs
Leakage rate: 10^ -5-10 ^-10 A/cm²
REDOX potential: 2.5V vs. NHE
The Application of Ga2O3
Because of its wide band gap and high electron mobility, β-Ga2O3
has a wide application prospect in power electronics,
photoelectronics, solar cells and other fields. Specific applications include:
Ultraviolet detectors and lasers
High power MOSFETs and Schottky diodes
High temperature sensor and potential sensor
Solar cells and LED materials
β-Ga2O3 still faces some challenges in preparation and application,
such as crystal growth, impurity control, device fabrication, etc. However, with the continuous development of technology, the
application prospect of β-Ga2O3 is still very broad.
| Gallium oxide, Ga2O3 single crystal | 2inch substrates | 10*15mm substrates |
| Orientation | (-201) | (-201) | (-201) | (010) | (010) | (010) |
| Dopant | Sn | Un-doped | Sn | Sn | Un-doped | Fe |
| Conductivity | n-type | n-type | n-type | n-type | n-type | Insulation(＞1010 |
| Nd-Na(cm-3) | 5E17~9E18 | 5E17 or less | 5E17~9E18 | 1E18~9E18 | 1E17~5E17 | - |
| Dimentions | A-B(mm) | 50.8±0.3 | 50.8±0.3 | 15±0.3 | 15±0.3 | 15±0.3 | 15±0.3 |
| C-D(mm) | 41~49.8 | 41~49.8 | 10±0.3 | 10±0.3 | 10±0.3 | 10±0.3 |
| Thickness | 0.68±0.02 | 0.68±0.02 | 0.68±0.02 | 0.5±0.02 | 0.5±0.02 | 0.5±0.02 |
| Reference(m | Fig.1 | Fig.1 | Fig.2 | Fig.3 | Fig.3 | Fig.3 |
Offset angle
(degree) | [010]:0±0.4 | [010]:0±0.4 | [010]:0±0.4 | 丄[102]:0±1 | 丄[102]:0±1 | 丄[102]:0±1 |
| [102]:0.7±0.4 | [102]:0.7±0.4 | [102]:0.7±0.4 | [102]:0±1 | [102]:0±1 | [102]:0±1 |
| FWHM(arcsec) | [010]:150 or less | [010]:150 or less | [010]:150 or less | 丄[102]:150 or | 丄[102]:150 or | 丄[102]:150 or |
| [102]:150 or less | [102]:150 or less | [102]:150 or less | [102]:150 or less | [102]:150 or less | [102]:150 or less |
| Surface | Front | CMP | CMP | CMP | CMP | CMP | CMP |
| Back | Rough | Rough | Rough | Rough | Rough | Rough
|
| Item | Specification |
| Orientation | -100 |
| Doped | UID | Mg | Fe |
| Electrical parameter | 1 ×1017~3×1018cm-3 | ≥1010 Ω ·cm | ≥1010 Ω ·cm |
| Twin-crystal swing curve half-height width | ≤150 |
|
| Dislocation density | ＜1×10 5 cm-2 |
| Dimension | A-B | C-D | 厚度 |
|
| 10mm | 10.5mm | 0.5(±0.02)mm |
| 5mm | 10mm | 0.5(±0.02)mm |
| Flatness | The long side is [010] Orientation |
| Surface | DSP/SSP |
| Ra<0.5nm |
| Mis<±1. |
