Sapphire lift pin for semiconductor Ceramic lift pins High purity
sapphire pins
Abstract of Sapphire lift pin
Sapphire lift pins are precision-engineered components widely used
in
semiconductor processing equipment, particularly in wafer handling,
epitaxial growth, and deposition systems such as MOCVD (Metal-Organic
Chemical Vapor Deposition), PECVD (Plasma Enhanced Chemical Vapor
Deposition), and other high-temperature, vacuum, or corrosive
environments. Fabricated from single-crystal aluminum oxide
(Al₂O₃), also known as synthetic sapphire, these lift pins are
valued for their exceptional hardness, thermal stability, chemical
resistance, and durability.
Properties of Sapphire lift pin
| Property | Value |
| Hardness | 9 on Mohs scale (second only to diamond) |
| Melting Point | >2,000°C |
| Thermal Conductivity | ~35 W/m·K |
| Thermal Expansion | ~5.3 × 10⁻⁶/K |
| Young's Modulus | ~345 GPa |
| Chemical Resistance | Inert to most acids, alkalis, and corrosive gases |
| Electrical | Excellent insulator |
| Optical Transparency | Transparent from UV to IR (150 nm – 5.5 μm) |
Sapphire lift pins are often custom-designed
Advantages of Sapphire Lift Pins
a. High Temperature Resistance
Sapphire maintains its mechanical strength at temperatures
exceeding 1,500°C, making it well-suited for epitaxial reactors and
deposition chambers where other materials may warp, oxidize, or
degrade.
b. Chemical Stability
Sapphire is chemically inert in reactive and corrosive gases such
as H₂, NH₃, and HF, ensuring long-term performance in CVD and
etching environments.
c. Extreme Hardness
The high surface hardness resists wear and scratching from wafer
contact and mechanical actuation. This minimizes particle
generation and contamination.
d. Dimensional Precision
Sapphire can be machined to tight tolerances (±1 μm), ensuring
consistent wafer lift height, positioning accuracy, and alignment
reliability.
e. Low Particle Generation
Unlike coated ceramics or metals that may flake or outgas under
thermal cycling, sapphire does not produce particulates, which is
critical for cleanroom and ultra-pure process environments.
f. Long Service Life
Sapphire’s wear resistance and stability under extreme conditions
contribute to lower maintenance frequency and longer equipment
uptime.
Physical image of sapphire lift pin
Applications of Sapphire Lift Pins
Sapphire lift pins are employed in a range of semiconductor and
advanced material processes where wafers need to be precisely
handled during fabrication. Key applications include:
a. MOCVD Systems
GaN, GaAs, and InP-based compound semiconductor growth
LED and laser diode production
Sapphire wafers and epi-ready substrates
b. PECVD and LPCVD Reactors
Wafer transfer during plasma-based thin film deposition
Used in microelectronics, solar cells, MEMS, and photonics
c. Thermal Processing Furnaces
d. Wafer Inspection & Handling
e. Etching and Cleaning Chambers
Q&A
Q:What key factors should be considered when purchasing sapphire
pins?
A: Application Scenario
- Material Conditions: Determine the environmental conditions the lift pins will be
exposed to, such as high temperatures or corrosive environments.
- Purpose: Choose a suitable design based on the specific application (e.g.,
spectroscopic measurement, precision instruments, etc.).
Dimensions and Specifications
- Diameter and Length: Select the appropriate diameter and length based on the size of
the samples being supported or lifted.
- Tolerance Requirements: Ensure that the lift pins meet the dimensional tolerance
requirements of your application to maintain accuracy.
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